Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices, 2nd edition
Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices
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Introduction to Microelectronic Fabrication, Second Edition, by Richard C. Jaeger, is a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing and is highlighted by careful explanations, clean, simple language, and numerous fully solved example problems.
The second edition includes an entirely new chapter on MEMS, as well as substantial modifications to the chapters on MOS and bipolar process integration. Also included is new or expanded coverage of lithography and exposure systems, trench isolation, chemical mechanical polishing, shallow junctions, transient enhanced diffusion, copper Damascene processes and process simulation.
Table of contents
1. An Overview of Microelectronic Fabrication.
3. Thermal Oxidation of Silicon.
5. Ion Implantation.
6. Film Deposition.
7. Interconnections and Contacts.
8. Packaging and Yield.
9. MOS Process Integration.
10. Bipolar Process Integration.
11. Processes for Microelectromechanical Systems—MEMS.
Answers to Selected Problems.
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Published by Pearson (October 17th 2001) - Copyright © 2002