Foundations of MEMS, 2nd edition

Published by Pearson (November 21, 2011) © 2012

  • Chang Liu University of Illinois at Urbana-Champaign

VitalSource eTextbook

ISBN-13: 9780133002515
Foundations of MEMS
Published 2011

Hardcover

ISBN-13: 9780132497367
Foundations of MEMS
Published 2011

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