Silicon VLSI Technology: Fundamentals, Practice, and Modeling, 1st edition

  • James D. Plummer
  • Michael Deal
  • Peter D. Griffin

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Overview

Unique in approach, this book provides an integrated view of silicon technology—with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies.

FEATURES/BENEFITS

  • Extensive use of modern computer simulation methods and examples—Integrated into each chapter.
    • Illustrates how technologies work. Allowing the reader to develop a better physical understanding of concepts and helps them in visualizing features of the technologies that are not easily seen any other way.
  • Early, broad exposure to a complete chip manufacturing process (Ch. 2).
    • Ties many diverse processing concepts together and establishes the context for the specific technologies discussed in later chapters.
  • Examples of modern manufacturing practice.
    • Providing readers with practical examples of fundamental concepts.
  • Historical perspective and introduction.
  • An integrated view of silicon technologywith an emphasis on modern computer simulation.
  • Extensive use of modern computer simulation methods and examples—integrated into each chapter.
  • Early, broad exposure to a complete chip manufacturing process.
  • Examples of modern manufacturing practice.

Table of contents

(NOTE: Chapters 3-11 include an Introduction, Historical Development and Basic Concepts, Manufacturing Methods and Equipment, Measurement Methods, Models and Simulation, Limits and Future Trends in Technologies and Models, Summary of Key Ideas, References, and Problems.)

1. Introduction and Historical Perspective.

Introduction. Integrated Circuits and the Planar Process—Key Inventions That Made It All Possible. Semiconductors. Semiconductor Devices. Semiconductor Circuit Families. Modern Scientific Discovery—Experiments, Theory and Computer Simulation. The Plan for This Book.



2. Modern CMOS Technology.

CMOS Process Flow.



3. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers.


4. Semiconductor Manufacturing— Clean Rooms, Wafer Cleaning and Gettering.


5. Lithography.


6. Thermal Oxidation and the Si/SiO2 Interface.


7. Dopant Diffusion.


8. Ion Implantation.


9. Thin Film Deposition.


10. Etching.


11. Backend Technology.

Published by Pearson (April 17th 2020) - Copyright © 2001